Aberration-corrected STEM: current performance and future directions
نویسندگان
چکیده
منابع مشابه
Aberration corrected TEM: current status and future prospects
Aberration correction leads to a substantial improvement in the interpretable resolution of Transmission Electron Microscopes. Electron optical correctors based on two strong hexapole elements linked through a round lens transfer doublet enables direct correction of all axial aberrations to third order. Subsequent, indirect computational analysis of a focal or tilt series of images offers the p...
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In a scanning transmission electron microscope (STEM), the elemental analysis at atomic resolution is realized by the combination with electron energy-loss spectroscopy (EELS), since an aberration corrected probe forming lens system enables us to obtain an electron probe sized about 0.1 nm [1]. In EELS, the energy resolution is mainly limited by the energy spread of the electron source, which i...
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The attainable specimen resolution is determined by the instrumental resolution limit d(i) and by radiation damage. Solid objects such as metals are primarily damaged by atom displacement resulting from knock-on collisions of the incident electrons with the atomic nuclei. The instrumental resolution improves appreciably by means of aberration correction. To achieve atomic resolution at voltages...
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INTRODUCTION AS VLSI (very large scale integration) technology evolves toward ever smaller features and multilayer designs, analysis and control of structures and compositions at the atomic level is becoming increasingly important. In 1998 Hitachi HighTechnologies Corporation released the HD-2000, a STEM (scanning transmission electron microscope) that was very well received for combining the e...
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Iron-rhodium (FeRh) nanoislands of equiatomic composition have been analysed using scanning transmission electron microscopy (STEM) electron energy loss spectroscopy(EELS) and high angle annular dark field (HAADF) techniques. Previous magnetometry results have lead to a hypothesis that at room temperature the core of the islands are antiferromagnetic while the shell has a small ferromagnetic si...
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ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2006
ISSN: 1742-6588,1742-6596
DOI: 10.1088/1742-6596/26/1/002